Method for reducing lead precipitation during wafer processing

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United States of America Patent

SERIAL NO

10926764

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Abstract

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A method for preventing lead precipitation during wafer processing is disclosed. The method includes singulating a semiconductor wafer having a plurality of solder bumps and applying cold deionized (DI) water to the semiconductor wafer during singulation. Application of the cold DI water reduces or prevents lead precipitation during the singulation process, and thereby reduces the presence of bump oxidation.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSIN-CHU 300-77

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Chia-Jen Taoyuan City, TW 16 275
Lin, Kuo-Wei Shinchu County, TW 29 445
Lin, Tzu-Han Hsin-Chu, TW 39 466
Su, Boe Chiayi City, TW 5 290
Yu, HM HsinChu, TW 2 13

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