Method of improving planarization of urethane polishing pads, and urethane polishing pad produced by the same

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United States of America Patent

APP PUB NO 20060046627A1
SERIAL NO

10924832

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Abstract

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For improving planarization of urethane polishing pads, at least one layer of the pad has a base resin and an isocyanate with a concentration within a range of 6.5-11.0 weight percent to obtain a high planarization property.

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Patent Owner(s)

Patent OwnerAddress
JH RHODES COMPANY INC2800 NORTH 44TH STREET SUITE 675 PHOENIX AS 85008

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Halberg, Dwaine Mesa, AZ 3 8
Renteln, Peter San Ramon, CA 16 93

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