Forming ferroelectric polymer memories
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United States of America Patent
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app pub date -
Oct 31, 2005
filing date -
May 31, 2002
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Abstract
In accordance with some embodiments, a ferroelectric polymer memory may be formed of a plurality of stacked layers. Each layer may be separated from the ensuing layer by a polyimide layer. The polyimide layer may provide reduced layer-to-layer coupling, and may improve planarization after the lower layer fabrication.
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