System and method for semiconductor manufacturing automation
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United States of America Patent
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Sep 4, 2007
Grant Date -
Mar 9, 2006
app pub date -
Sep 3, 2004
filing date -
Sep 3, 2004
priority date (Note) -
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Abstract
The present disclosure provides a method and system for semiconductor manufacturing automation. In one example, a method for semiconductor manufacturing automation comprises providing an identification table; defining a scheduled sequence; recording a performed sequence; and issuing a warning, if the scheduled sequence does not match the performed sequence.
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