Non-bonded rotatable targets for sputtering
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United States of America Patent
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Issued Date -
Mar 30, 2006
app pub date -
Sep 30, 2004
filing date -
Sep 30, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A rotatable target for sputtering is described. This target can include a target backing tube having an exterior surface; a backing layer in contact with the exterior surface of the target backing tube, the backing layer being electrically conductive and thermally non-conductive; and a plurality of target cylinders located around the target backing tube and in contact with the backing layer.
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