Substrate processing showerheads
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United States of America Patent
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N/A
Issued Date -
Mar 30, 2006
app pub date -
Sep 22, 2005
filing date -
Sep 24, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A sheet (200) adapted for fitting in a substrate processing showerhead (100), the sheet including a plurality of orifices (208, 210), wherein boundaries of at least some of the orifices (208) are substantially surrounded by an upstanding wall (212) formed of deformable material.
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