Importance

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Abstract

Disclosed is new architecture of microelectromechanical system (MEMS) device. The device has a partially reflective optical layer, a deformable mechanical layer and a mirror layer, each of which forms an independent electrode. A support post separates the optical layer from the mechanical layer. The mirror layer is located and movable between a first position and a second position, which are located between the optical layer and the mechanical layer. The mirror is spaced from the support post, and mirror is responsive to voltages applied to the three electrodes, thereby moving between the first position and the second position. By applying various combinations of voltage differences between the optical layer and the mirror, and between the mirror and the mechanical layer, the location of the mirror between the first and second positions is tunable throughout the space between the two positions. The tunable MEMS device can be used as an analog display element or analog electrical device such as a tunable capacitor. The MEMS device of the disclosed architecture can also be operated in a non-analog manner.

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First Claim