MEMS switches with deforming membranes

United States of America Patent

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May 25, 2010
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Aug 5, 2005
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Sep 27, 2004

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Abstract

MEMS switches are formed with membranes or layers that are deformable upon the application of a voltage. In some embodiments, the application of a voltage opens switch contacts.

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SNAPTRACK INC	5775 MOREHOUSE DR SAN DIEGO CA 92121

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Inventor Name	Address	# of filed Patents	Total Citations
Chui, Clarence	San Mateo, US	271	8883
Kothari, Manish	Cupertino, US	217	7602

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MEMS switches with deforming membranes

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United States of America Patent

11198925

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DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
May 25, 2010	US,7724993,B2 US7724993B2	GRANTED PATENT AS SECOND PUBLICATION
March 30, 2006	US,20060067648,A1 US20060067648A1	FIRST PUBLISHED PATENT APPLICATION

PATENT NO	7724993
SERIAL NO	11198925
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11198925

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