High-temperature reduced size manometer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7201057
APP PUB NO 20060070447A1
SERIAL NO

10954386

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A pressure-sensing device and method for making and using such device having a temperature differential between two portions of the device is disclosed. A solid-state heat pump, such as a thermo-electric cooler (TEC), is used to pump heat from a cold portion to a hot portion of the device. A pressure sensor sensing the pressure of a hot fluid is disposed in the hot portion of the device, and sensor electronics are disposed in the cold portion of the device.

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Patent Owner(s)

  • MKS INSTRUMENTS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Agami, Mark Reading, MA 4 89

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