Method and device for protecting interferometric modulators from electrostatic discharge
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United States of America Patent
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Jul 29, 2008
Grant Date -
Apr 13, 2006
app pub date -
May 2, 2005
filing date -
Sep 27, 2004
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A MEMS device such as an interferometric modulator includes an integrated ESD protection element capable of shunting to ground an excess current carried by an electrical conductor in the MEMS device. The protection element may be a diode and may be formed by depositing a plurality of doped semiconductor layers over the substrate on which the MEMS device is formed.
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