Computer-implemented methods and systems for classifying defects on a specimen
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United States of America Patent
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Sep 10, 2013
Grant Date -
Apr 20, 2006
app pub date -
Oct 12, 2005
filing date -
Oct 12, 2004
priority date (Note) -
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status (Latency Note)
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Abstract
Various computer-implemented methods for classifying defects on a specimen are provided. One method includes assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The method also includes displaying information about the defect groups to a user. In addition, the method includes allowing the user to assign a classification to each of the defect groups. Systems configured to classify defects on a specimen are also provided. One system includes program instructions executable on a processor for assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects. The system also includes a user interface configured for displaying information about the defect groups to a user and allowing the user to assign a classification to each of the defect groups.
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