Substrate-to-mask alignment and securing system with temperature control for use in an automated shadow mask vacuum deposition process
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United States of America Patent
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Issued Date -
Apr 27, 2006
app pub date -
Oct 22, 2004
filing date -
Oct 22, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention is a substrate holder system for and method of providing a substrate-to-mask alignment mechanism, securing mechanism and temperature control mechanism. The substrate holder system is suitable for use in an automated shadow mask vacuum deposition process. The substrate holder system includes a system controller, and a substrate arranged between a magnetic chuck assembly and a mask holder assembly. The magnetic chuck assembly includes a magnetic chuck, a thermoelectric device, a plurality of thermal sensors and a plurality of light sources. The mask holder assembly includes a shadow mask, a mask holder, a motion control system and a plurality of cameras. The substrate holder system of the present invention provides close contact between the substrate and the shadow mask thereby avoiding the possibility of evaporant material entering into a gap therebetween.
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