Pressure control system in a photovoltaic substrate deposition apparatus
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United States of America Patent
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Issued Date -
May 11, 2006
app pub date -
Nov 10, 2005
filing date -
Nov 10, 2004
priority date (Note) -
Abandoned
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Abstract
This invention comprises an apparatus for the deposition of thin layers upon a substrate for the production of photovoltaic cells wherein the individual reaction chambers are separated from each other by low pressure isolation zones which prevent cross contamination of adjacent reaction chambers and control pressure levels in each reaction chamber while, at the same time, allowing the uninterrupted transfer of a substrate from one reaction chamber to the next without any mechanical obstruction.
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