Method and appartus for removing target material from a substrate
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United States of America Patent
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Issued Date -
May 11, 2006
app pub date -
Jul 18, 2003
filing date -
Jul 20, 2002
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method for removing target material from a substrate, the method comprising directing a supply of particulate material toward a target zone of target material present on the substrate and directing radiant optical energy toward the target zone, the radiant optical energy interacting with the target material and the particulate material promoting removal of target material from the substrate.
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