Adapter apparatus for a substrate workstation
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United States of America Patent
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N/A
Issued Date -
May 11, 2006
app pub date -
Nov 3, 2005
filing date -
Nov 5, 2004
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The present invention relates to an adapter apparatus for a substrate workstation. The substrate workstation comprises at least one substrate carrier that receives from one side in substantially centered fashion, for transport and/or for handling, a substrate to be processed with the substrate workstation. The intention is to allow substrates that permit contamination only in the edge region also to be processed, in the simplest possible fashion, using a substrate workstation embodied for the centered reception of substrates. The adapter apparatus according to the present invention is characterized in that the adapter apparatus is reversibly adaptable to a substrate carrier of the substrate workstation. The adapter apparatus is embodied in such a way that the substrate is receivable only substantially at its edge region by the adapter apparatus. The present invention further relates to a substrate workstation.
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