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Abstract

A nano-scale surface analysis system comprises an electrically powered apparatus for the generation of soft x-ray laser radiation. The apparatus comprises an excitation circuit having at least two or more electrically conducting structures separated by a liquid dielectric for providing a high current excitation pulse, and a capillary structure having a capillary with a length to diameter ration of about 20 to 1000 for enclosing a selected lasing material, wherein the excitation circuit is capable of generating a plasma volume within the capillary structure to produce a population inversion. The generator further comprises a focusing optic for receiving the soft x-ray radiation from the emissions source and focus the soft x-ray radiation onto a target for forming a nanoplasma, the soft x-ray radiation being focused onto an area of the target having a diameter of less than 100 nm.

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