Transportation system

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20060104712A1
SERIAL NO

11211236

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
BROOKS AUTOMATION US LLC15 ELIZABETH DRIVE CHELMSFORD MA 01824

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bufano, Michael L Belmont, MA 22 365
Fosnight, William Carlisle, MA 41 1369
Friedman, Gerald M New Ipswich, NH 20 235
Gilchrist, Ulysses Reading, MA 97 1670
Hofmeister, Christopher Hampstead, NH 130 2952

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