MEMS-based sensor for lubricant analysis
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United States of America Patent
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Jun 2, 2009
Grant Date -
May 18, 2006
app pub date -
Nov 12, 2004
filing date -
Nov 12, 2004
priority date (Note) -
Expired
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Abstract
A fluid contamination analyzer employs one or more MEMS-based sensors. The sensors are incorporated into probes or alternatively may be employed in an in-line analyzer residing in the fluid. The sensors, which can be selective to detect a distinct contaminant within the fluid, sense an impedance of the fluid, which is a function of its contamination and communicates the impedance to analysis circuitry.
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