Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices
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United States of America Patent
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Issued Date -
May 18, 2006
app pub date -
Nov 8, 2005
filing date -
Nov 12, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Improved nozzle design that discharges fluid streams through a series of nozzle orifices distributed along a length of the nozzle. The present invention may be incorporated into a wide range of microelectronic device manufacturing processes and equipment types for which an array of process streams are desired for treating microelectronic workpieces. The present invention is particularly useful to cryogenically clean microelectronic workpieces.
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