DIFFERENTIAL INTERFEROMETRIC LIGHT MODULATOR AND IMAGE DISPLAY DEVICE
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United States of America Patent
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Nov 26, 2004
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Nov 26, 2004
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Abstract
A light modulator incorporates a polarization sensitive prism and a novel MEMS ribbon device to impart a relative phase shift to polarization components of an incident light beam. A linear array of phase shifting elements in the MEMS device creates a linear image which is scanned to form a two dimensional scene. Alternatively the deflection of each cantilever in a linear array of atomic force microscope cantilevers may be measured simultaneously.
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