Resistance-heated boat and manufacturing method thereof
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United States of America Patent
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N/A
Issued Date -
Jun 1, 2006
app pub date -
Dec 1, 2003
filing date -
Dec 23, 2002
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
Disclosed herein are a resistance-heated boat and a manufacturing method thereof for use in vacuum vapor deposition of a metal evaporant onto a substrate in a resistance heating manner. The boat comprises a graphite block to be formed into a boat, and a protective barrier formed at the graphite surface for preventing the graphite layer from reacting with the metal evaporant. The protective barrier has an aluminum-rich layer, and a nitrogen containing compound layer. According to the present invention, it is possible to achieve stable and continuous evaporation of metals including aluminum.
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