Wafer probe station having environment control enclosure
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United States of America Patent
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-
Mar 25, 2008
Grant Date -
Jun 22, 2006
app pub date -
Dec 22, 2005
filing date -
Jun 11, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
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