Lithographic apparatus and device manufacturing method
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 25, 2007
Grant Date -
Jun 29, 2006
app pub date -
Dec 28, 2004
filing date -
Dec 28, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A projection system comprises an array of lenses MLA, each lens transmitting a unique part of a patterned beam. Measuring devices measure a distance between the array of lenses MLA and a substrate W. A controller controls an actuator to adjust a position (e.g., height and/or tilt) of the microlens array MLA.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully