Lithographic apparatus and device manufacturing method utilizing a multiple substrate carrier for flat panel display substrates
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United States of America Patent
Stats
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Jul 10, 2007
Grant Date -
Jun 29, 2006
app pub date -
Mar 1, 2005
filing date -
Dec 23, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A system and method allow for more than one substrate to be simultaneously moved and/or positioned on a support table. In one example, this is accomplished through use of a frame that either supports or separates one or more substrates for either transport or positioning on a support table. In another example, this is accomplished through use of spacers on a support table, which are used to properly position one or more substrates. In yet another example, this is accomplished through use of a robot placing one or more substrates on the support table.
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Cited Art Landscape
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