Method and structure for reducing parasitic influences of deflection devices on spatial light modulators
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United States of America Patent
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Nov 28, 2006
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N/A
app pub date -
Jan 7, 2005
filing date -
Jan 7, 2005
priority date (Note) -
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Abstract
A spatial light modulator is provided. The spatial light modulator includes a first substrate, the first substrate comprising a plurality of electrodes adapted to receive control signals, and a bias grid coupled to the first substrate and electrically isolated from the plurality of electrodes. The spatial light modulator also includes a mirror plate electrically coupled to the bias grid and adapted to rotate from a first orientation to a second orientation in response to the control signals received by the plurality of electrodes. The spatial light modulator further includes a landing post support structure coupled to the first substrate and electrically coupled to the bias grid and a landing post coupled to the landing post support structure. The landing post is electrically coupled to the bias grid and adapted to make contact with the mirror plate positioned at the first orientation.
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