System and method of planar positioning
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United States of America Patent
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app pub date -
Jan 6, 2006
filing date -
Mar 14, 2003
priority date (Note) -
Abandoned
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Abstract
A system and method of controlling the relationship between two surfaces (such as a primary surface and a reference surface) and correcting any deviation from the desired or ideal relationship generally employ a plurality of actuators and flexural assemblies. The actuators may be driven in unison to translate the primary surface in one-dimension; the actuators may also be driven independently, accommodating fine adjustment in pitch, roll, or both, of the primary surface. Flexural assemblies may be implemented to minimize lateral cross-coupling between the linear actuators.
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