System and method utilizing an electrooptic modulator

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United States of America Patent

APP PUB NO 20060164711A1
SERIAL NO

11039900

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A system and method utilize an array of dynamically controllable optical elements to adjust one or more portions of a beam propagating therethrough. For example, the adjustments can be to change a ratio of horizontally and vertically polarized light in the portions of the beam. The adjustments can be made through application of an appropriate electric field to each of the optical elements, which forms an electrooptic modulator. In one example, a polarizer/analyzer is positioned after the array, such that only desired orientations are transmitted. The polarizing provides a desired light intensity profile, which can, for example, make the intensity inform across the beam or be used to partially or fully attenuate (e.g., block) the beam.

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Patent Owner(s)

Patent OwnerAddress
ASML HOLDING N VHOLLAND WEIDE EINDHOVEN VELDHOVEN NORTH BRABANT

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Govil, Pradeep K Norwalk, CT 21 194
Tsacoyeanes, James G Southbury, CT 8 79

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