Microscope system for testing semiconductors

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United States of America Patent

APP PUB NO 20060169897A1
SERIAL NO

11335014

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Abstract

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A system that includes an imaging device for effectively positioning a probe for testing a semiconductor wafer.

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Patent Owner(s)

Patent OwnerAddress
CASCADE MICROTECH INC9100 SW GEMINI DRIVE BEAVERTON OR US 97008

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Andrews, Peter Beaverton, OR 91 2527
Hess, David Beaverton, OR 36 232

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