Processing system with multi-chamber pump, and related apparatus and methods
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United States of America Patent
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Issued Date -
Aug 10, 2006
app pub date -
Feb 7, 2005
filing date -
Feb 7, 2005
priority date (Note) -
Abandoned
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Abstract
Described are apparatus, equipment, systems, architecture, and methods for dispensing one or more process fluids to one or more processing stations, involving the use of at least one a multi-chamber pump, including an embodiment for spin-coating microelectronic or semiconductor substrates.
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