Control of process gases in specimen surface treatment system
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United States of America Patent
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app pub date -
Jul 28, 2005
filing date -
Feb 10, 2005
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Abstract
A method of removing hydrocarbon contaminants from a surface of a specimen is provided. The method comprises the steps of: positioning a specimen within a vacuum chamber; maintaining the vacuum chamber at a suitable pressure; introducing into the vacuum chamber a process gas comprising a hydrogen precursor or a mixture of H2 and O2; and generating a plasma discharge in the vacuum chamber such that the specimen is subject to exposure to hydrogen and oxygen ions and hydrogen, oxygen, and hydroxyl radicals. Additional embodiments are described.
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