MEMS based RF components and a method of construction thereof
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United States of America Patent
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Issued Date -
Aug 10, 2006
app pub date -
Feb 10, 2005
filing date -
Feb 10, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A three dimensional waveguide is integrated with a MEMS structure to control a signal in various RF components. The components include switches, variable capacitors, filters and phase shifters. A controller controls movement of the MEMS structure to control a signal within the component. A method of construction and a method of operation of the component are described. The switches have high power handling capability and can be operated at high frequencies. By integrating a three dimensional waveguide with a MEMS structure, the components can be small in size with good operating characteristics.
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