Lithographic apparatus and device manufacturing method

United States of America Patent

Stats

Dec 2, 2008
Grant Date
Aug 24, 2006
app pub date
Feb 18, 2005
filing date
Feb 18, 2005

priority date (Note)
In Force

status (Latency Note)

Importance

Loading Importance Indicators... loading....

Abstract

A lithographic apparatus provided with an array of individually controllable elements that is detachably mounted to mounting points on a support frame of the lithographic apparatus.

Loading the Abstract Image... loading....

First Claim

See full text

loading....

all claims.. loading....

Family

Loading Family data... loading....

Patent Owner(s)

ASML NETHERLANDS B.V.;MICRONIC LASER SYSTEMS AB

International Classification(s)

G03B:APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS O....

[Classification Symbol]

[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bleeker, Arno Jan	Westerhoven, NL	99	2903
Franken, Dominicus Jacobus Petrus Adrianus	Veldhoven, NL	28	272
Hoeks, Martinus Hendricus Hendricus	Breugel, NL	6	118
Kessels, Lambertus Gerardus Maria	Aalst-Waalre, NL	12	109
Sandstrom, Tobrjorn	Pixbo, SE	1	8

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

FREE	$9.95/mo		$39.95/mo	$99.95/mo

PAIR Watch Weekly Update		$2.75/mo/patent		$2.65/mo/patent
PAIR Watch Daily Update		$5.75/mo/patent		$5.55/mo/patent
Upgrade Now	Upgrade Now		Upgrade Now	Upgrade Now

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Watches in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

FREE	$9.95/mo		$39.95/mo	$99.95/mo

PAIR Watch Weekly Update		$2.75/mo/patent		$2.65/mo/patent
PAIR Watch Daily Update		$5.75/mo/patent		$5.55/mo/patent
Upgrade Now	Upgrade Now		Upgrade Now	Upgrade Now

Patent Searching
Technology Searching
Owner and Inventor Searching
Patent Analytics
Owner Analytics
Attorney Analytics
Inventor Analytics
Technology Analytics
Mobile Searching
Tagging
Advanced Patent Analytics
Advanced Owner Analytics
Mobile Portfolio/Analytics
Detailed Attorney Information
Prosecution analytics
Pre-publication Data
Monthly PAIR Information and Watches
Number of patents in all portfolios	100 (maximum)	1000 (maximum)	2000 (maximum)	Unlimited
Follows in all categories (Watch)	10 (maximum)	50 (maximum)	500 (maximum)	Unlimited
Maximum number of portfolios	5 (maximum)	10 (maximum)	100 (maximum)	Unlimited
Maximum number of comparisons	1 (maximum)	5 (maximum)	20 (maximum)	Unlimited

Lithographic apparatus and device manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

11061754

Stats

Importance

Abstract

First Claim

Family

Patent Owner(s)

International Classification(s)

Inventor(s)

Cited Art Landscape

Patent Citation Ranking

Forward Cite Landscape

Maintenance Fees

Full Text

Legal Events

Matter Detail

Renewals Detail

Load PAIR data

Payment Failure

Cancel Scheduled Update

Remove Watch on PAIR

Update PAIR data

PAIR load has been initiated

File History PDF

Add Patents to Portfolio

PATENT NO	7460208
APP PUB NO	20060187428A1
SERIAL NO	11061754
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
December 02, 2008	US,7460208,B2 US7460208B2	GRANTED PATENT AS SECOND PUBLICATION
August 24, 2006	US,20060187428,A1 US20060187428A1	FIRST PUBLISHED PATENT APPLICATION

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Please Confirm Your Upgraded Plan Purchase By Selecting Upgrade Button

Free

Premium

Professional

Enterprise

FREE

$9.95/mo

$39.95/mo

$99.95/mo

Please Confirm Your Upgraded Plan Purchase By Selecting Upgrade Button

11061754

Stats

Importance

Abstract

First Claim

Family

Patent Owner(s)

International Classification(s)

Inventor(s)

Cited Art Landscape

Patent Citation Ranking

Forward Cite Landscape

Maintenance Fees

Full Text

Legal Events

Matter Detail

Renewals Detail

Load PAIR data

Payment Failure

Cancel Scheduled Update

Remove Watch on PAIR

Update PAIR data

PAIR load has been initiated

File History PDF

Add to Portfolio(s)

Important Notes on Latency of Status data

Important Note on Priority Date data