Fabricating micro devices using sacrificial materials
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United States of America Patent
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Dec 30, 2008
Grant Date -
Aug 24, 2006
app pub date -
Apr 18, 2006
filing date -
Oct 27, 2003
priority date (Note) -
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Abstract
A method of fabricating a tiltable micro mirror plate includes forming a substrate comprising an upper surface and a hinge support post in connection with the upper surface, disposing over the substrate a first sacrificial material selected from the group of amorphous carbon, polyarylene, polyarylene ether, and hydrogen silsesquioxane, depositing one or more layers of structural materials over the first sacrificial material, forming an opening in the one or more layers of structural materials, wherein the opening can provide access from outside to the first sacrificial material below the one or more layers of structural materials, and removing the first sacrificial material to form the tiltable micro mirror plate in connection with the hinge support post.
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