Measuring device for the measurement of optical properties of coated substrates

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United States of America Patent

PATENT NO 7450233
APP PUB NO 20060192964A1
SERIAL NO

10996808

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A measuring device includes several sequentially disposed coating chambers for measuring optical properties of coated substrates. These coating chambers are separated from one another by partitioning walls, whose free ends are located closely above the substrate. The substrate is preferably a continuous film. By measuring the reflection, the transmission, etc. of the substrate between the individual coating chambers, it becomes possible to carry out measurements within only partially completed layer systems. This yields advantages for the technical operation control of the coating process.

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Patent Owner(s)

  • APPLIED MATERIALS GMBH & CO. KG

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hein, Stefan Blankenbach, DE 51 305
Lotz, Hans-Georg Grundau-Rothenbergen, DE 32 269
Sauer, Peter Schluchtern, DE 18 83
Skuk, Peter Nidderau, DE 11 40

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