Method of repairing micromirrors in spatial light modulators
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United States of America Patent
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May 20, 2008
Grant Date -
Aug 31, 2006
app pub date -
Feb 28, 2005
filing date -
Feb 28, 2005
priority date (Note) -
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Abstract
Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.
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