Reduced cost process modules
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United States of America Patent
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Issued Date -
Sep 7, 2006
app pub date -
Mar 2, 2005
filing date -
Mar 2, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A process module and a method of making the same for processing substrates comprising two different types of materials, one of the materials being a corrosive-retardant material forming a module interior face disposed to be subjected to the interior atmosphere in the module, and another of the materials being located on the side of the corrosive-retardant material to define a module outer face opposite the interior face, wherein the corrosive-retardant material and the other material are joined together.
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