Parylene coated microfluidic components and methods for fabrication thereof
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United States of America Patent
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Issued Date -
Sep 14, 2006
app pub date -
Dec 7, 2005
filing date -
Dec 8, 2004
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method for fabricating parylene coated microfluidic valves is disclosed. A three-dimensional mold made of a first wax is formed. A sacrificial material made of a second wax is provided as a temporary support and then dissolved. A parylene coating is deposited onto the mold. A component material is poured onto the mold and cured, and the first wax is melted away. Further, a method for parylene coating of two-dimensional microfluidic components comprises: forming a lithographic mold of a microfluidic component, the mold made of a photoresist material; coating the lithographic mold with parylene; and removing the lithographic mold.
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