Method and system for high-speed, precise micromachining an array of devices
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United States of America Patent
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Feb 23, 2010
Issued Date -
N/A
app pub date -
May 2, 2006
filing date -
Mar 27, 2002
priority date (Note) -
Expired
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Abstract
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.
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