Method and apparatus for compensation or amelioration of lens field curvature and other imaging defects by utilizing a multi-wavelength setting illumination source
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United States of America Patent
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Issued Date -
Sep 21, 2006
app pub date -
Mar 17, 2006
filing date -
Mar 18, 2005
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Methods and apparatus for correcting imaging defects, particularly focus defects induced by the lens or scan, in a projection imaging tool (PIT) are described. An illumination source is provided that can operate either simultaneously or alternately, at two or more discrete wavelength settings. The repeatable imaging defects of the PIT are measured. The cross field lens chromatic response is characterized at multiple discrete wavelength settings. Then, a compensating arrangement is designed tailored to compensate for the imaging defects and is used in the PIT.
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