Surface-coating method, production of microelectronic interconnections using said method and integrated circuits
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United States of America Patent
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Issued Date -
Sep 21, 2006
app pub date -
Feb 13, 2004
filing date -
Feb 17, 2003
priority date (Note) -
Abandoned
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Abstract
The present invention relates to a process for coating a surface of a substrate with a seed film of a metallic material, the said surface being an electrically conductive or semiconductive surface and having recesses and/or projections. The process comprises the following: an organic film is placed on the said surface, the said film having a thickness such that the free face of this film conformally follows the recesses and/or projections of the said electrically conductive or semiconductive surface on which it is placed; a precursor of the metallic material is inserted within the said organic film placed on the said surface at the same time as, or after, the step consisting in placing the said organic film on the said surface; and the said precursor of the metallic material inserted within the said organic film is converted into the said metallic material. This process allows integrated circuits, interconnects in microelectronics and microsystems to be fabricated.
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