Method and system for automatic target finding

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United States of America Patent

APP PUB NO 20060232777A1
SERIAL NO

10569466

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Abstract

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A method and system are presented for automatic target finding by using two imaging channels with relatively low and high magnifications, using the low magnification channel (relatively large field of view) for finding a region of interest (i.e., that of the targets location within the field), scanning this zone by grabbing images via the high magnification channel (relatively small field of view) and marking the overlay targets using image processing algorithms.

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Patent Owner(s)

Patent OwnerAddress
NOVA MEASURING INSTRUMENTS LTDPO BOX 266 REHOVOT IL 76100

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Finarov, Moshe Rehovot, IL 104 1587
Hocman, Ido Rehovot, IL 1 4

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