Capacitive micromachined acoustic transducer
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United States of America Patent
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Dec 26, 2006
Grant Date -
Oct 19, 2006
app pub date -
Apr 13, 2005
filing date -
Apr 13, 2005
priority date (Note) -
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status (Latency Note)
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Abstract
A micromachined capacitive acoustic transducer including an electrode formed by a perforated plate and another electrode formed by a shallowly corrugated membrane anchored at one or more positions on the substrate which also supports the said perforated plate is described. Also disclosed includes: a fixed perforated plate; a movable shallowly corrugated membrane having holes to form acoustic filter to a certain frequency or a range of frequencies spaced from the perforated plate that is anchored in one or more location but loose at other locations; a support structure in the perforated plate maintaining the minimum separation between the membrane and the perforated plate near the perimeter.
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