Cassette storage equipment

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20060245860A1
SERIAL NO

11394095

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Abstract

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A cassette storage equipment. The cassette storage equipment comprises a cassette storage spatially storing a cassette receiving a plurality of substrates in multiple levels, a transporting unit moving along the cassette storage, comprising a elevating structure and a cassette moving device disposed thereon, and a substrate transporting device transporting the substrate piece by piece to the processing device from the transporting unit. A substrate detecting device is disposed on the elevating structure to obtain a mapping data from the substrates transported form the cassette storage to a cassette on the elevating structure.

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Patent Owner(s)

Patent OwnerAddress
DAIFUKU CO LTD2-11 MITEJIMA 3-CHOME NISHIYODOGAWA-KU OSAKA-SHI OSAKA 5550012

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Moriya, Susumu Shiga, JP 29 525
Ono, Takayoshi Shiga, JP 11 76

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