Vacuum device
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United States of America Patent
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Issued Date -
Nov 16, 2006
app pub date -
Jul 14, 2004
filing date -
Aug 20, 2003
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A vacuum device comprises a plurality of cryopumps (10), particularly a plurality of cryopumps connected in parallel. Further, at least one compressor device (16) is provided which is connected to the cryopumps (10) via medium supply conduits (12). A medium return conduit (14) is also connected to the compressor device (16) and the cryopumps (10). Arranged between the medium supply conduit (12) and the medium return conduit (14) is a storage container (20) for medium. Further, a pressure measurement device (30) is provided in the medium supply conduit (12). The pressure measurement device (30) is connected, via a control unit (32), to a supply valve (26). To keep the pressure difference at the cryopumps (10) as constant as possible, the supply valve (26) is opened when a threshold value of the pressure in the medium supply conduit (12) is exceeded, thus causing medium to flow into the storage container (20).
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