MEMS devices with stiction bumps

United States of America Patent

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Jun 30, 2009
Grant Date
Nov 23, 2006
app pub date
Jul 24, 2006
filing date
Apr 8, 1998

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Abstract

An interferometric modulator comprising a substrate, a movable membrane and one or more stiction bumps disposed between the substrate and the movable membrane. The stiction bumps are configured to mitigate stiction between the substrate and the movable membrane.

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SNAPTRACK INC	5775 MOREHOUSE DR SAN DIEGO CA 92121

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Inventor Name	Address	# of filed Patents	Total Citations
Miles, Mark W	San Francisco, US	140	17545

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MEMS devices with stiction bumps

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United States of America Patent

11492535

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PATENT NO	7554711
APP PUB NO	20060262380A1
SERIAL NO	11492535
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
June 30, 2009	US,7554711,B2 US7554711B2	GRANTED PATENT AS SECOND PUBLICATION
November 23, 2006	US,20060262380,A1 US20060262380A1	FIRST PUBLISHED PATENT APPLICATION

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11492535

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