Flexible hybrid defect classification for semiconductor manufacturing
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United States of America Patent
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Nov 28, 2006
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app pub date -
Sep 30, 2004
filing date -
Sep 30, 2004
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Abstract
Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules included in the sequence may be selected by a user using a graphical interface. The method also includes classifying the defects based on results of applying the sequence of rules to the inspection data.
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