US Patent Application No: 2006/0280,319

Number of patents in Portfolio can not be more than 2000

Micromachined Capacitive Microphone

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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This invention relates to a micromachined capacitive microphone having a shallowly corrugated diaphragm that is anchored at one or more locations on the support has a plurality of dimples to support itself and rest freely on the perforated backplate. The diaphragm whose ends are not anchored is bounded by the taps of edge rail. Also disclosed includes: a fixed perforated backplate having one or more regions; an adjustable cantilever formed by the diaphragm, the support and the backplate; a plurality of dimples maintaining vertical separation between diaphragm and backplate; and the patterning of conductor electrodes carried by diaphragm and backplate.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
GENERAL MEMS CORPORATIONSUNNYVALE, CA7

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ata, Erhan La Jolla, CA 5 34
Wang, Yunlong Fremont, CA 27 83
Wu, Guanghua Dublin, CA 11 66

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
INVENSENSE, INC. (9)
7,825,484 Micromachined microphone and multisensor and method for producing same 14 2005
7,961,897 Microphone with irregular diaphragm 3 2006
7,449,356 Process of forming a microphone using support member 9 2006
7,885,423 Support apparatus for microphone diaphragm 6 2007
8,270,634 Multiple microphone system 1 2007
8,309,386 Process of forming a microphone using support member 3 2008
8,351,632 Noise mitigating microphone system and method 0 2009
8,363,860 MEMS microphone with spring suspended backplate 0 2010
8,358,793 Microphone with irregular diaphragm 1 2011
 
PIXTRONIX, INC. (7)
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 0 2007
8,519,945 Circuits for controlling display apparatus 0 2007
8,526,096 Mechanical light modulators with stressed beams 0 2009
8,169,679 MEMS anchors 5 2009
8,520,285 Methods for manufacturing cold seal fluid-filled display apparatus 0 2011
8,519,923 Display methods and apparatus 0 2012
8,599,463 MEMS anchors 0 2012
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (2)
7,912,235 Capacitive microphone and method for making the same 3 2006
8,468,665 Methods for making capacitive microphone 0 2011
 
The Research Foundation of State University of New York (2)
7,903,835 Miniature non-directional microphone 0 2006
8,374,371 Miniature non-directional microphone 0 2011
 
AMERICAN AUDIO COMPONENTS INC. (1)
8,265,309 Condenser microphone 1 2009
 
GENERAL MEMS CORPORATION (1)
8,571,249 Silicon microphone package 0 2010
 
KNOWLES ELECTRONICS ASIA PTE. LTD. (1)
8,526,665 Electro-acoustic transducer comprising a MEMS sensor 0 2008
 
WOLFSON MICROELECTRONICS PLC (1)
8,198,715 MEMS device and process 0 2008