US Patent Application No: 2006/0280,319

Number of patents in Portfolio can not be more than 2000

Micromachined Capacitive Microphone

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Abstract

This invention relates to a micromachined capacitive microphone having a shallowly corrugated diaphragm that is anchored at one or more locations on the support has a plurality of dimples to support itself and rest freely on the perforated backplate. The diaphragm whose ends are not anchored is bounded by the taps of edge rail. Also disclosed includes: a fixed perforated backplate having one or more regions; an adjustable cantilever formed by the diaphragm, the support and the backplate; a plurality of dimples maintaining vertical separation between diaphragm and backplate; and the patterning of conductor electrodes carried by diaphragm and backplate.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
GENERAL MEMS CORPORATIONSUNNYVALE, CA4

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ata, Erhan La Jolla, CA 4 19
Wang, Yunlong Fremont, CA 23 59
Wu, Guanghua Dublin, CA 8 40

Patent Citation Ranking

Forward Cites

Patent Info (Count) # Cites Year
 
ANALOG DEVICES, INC. (9)
7,825,484 Micromachined microphone and multisensor and method for producing same 8 2005
7,961,897 Microphone with irregular diaphragm 1 2006
7,449,356 Process of forming a microphone using support member 6 2006
7,885,423 Support apparatus for microphone diaphragm 4 2007
8,270,634 Multiple microphone system 0 2007
8,309,386 Process of forming a microphone using support member 3 2008
8,351,632 Noise mitigating microphone system and method 0 2009
8,363,860 MEMS microphone with spring suspended backplate 0 2010
8,358,793 Microphone with irregular diaphragm 0 2011
 
The Research Foundation of State University of New York (2)
7,903,835 Miniature non-directional microphone 0 2006
8,374,371 Miniature non-directional microphone 0 2011
 
AMERICAN AUDIO COMPONENTS INC. (1)
8,265,309 Condenser microphone 0 2009
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (1)
7,912,235 Capacitive microphone and method for making the same 3 2006
 
PIXTRONIX, INC. (1)
8,169,679 MEMS anchors 0 2009
 
WOLFSON MICROELECTRONICS PLC (1)
8,198,715 MEMS device and process 0 2008