Micromachined Capacitive Microphone

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20060280319A1
SERIAL NO

11160071

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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This invention relates to a micromachined capacitive microphone having a shallowly corrugated diaphragm that is anchored at one or more locations on the support has a plurality of dimples to support itself and rest freely on the perforated backplate. The diaphragm whose ends are not anchored is bounded by the taps of edge rail. Also disclosed includes: a fixed perforated backplate having one or more regions; an adjustable cantilever formed by the diaphragm, the support and the backplate; a plurality of dimples maintaining vertical separation between diaphragm and backplate; and the patterning of conductor electrodes carried by diaphragm and backplate.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
GENERAL MEMS CORPORATIONSUNNYVALE, CA0

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ata, Erhan San Diego, CA 3 66
Wang, Yunlong Fremont, CA 21 226
Wu, Guanghua Dublin, CA 7 122

Cited Art Landscape

Patent Info (Count) # Cites Year
 
SHARP KABUSHIKI KAISHA (1)
* 6870937 Electroacoustic transducer, process of producing the same and electroacoustic transducing device using the same 16 2000
 
IC Sensors, Inc. (1)
* 5209118 Semiconductor transducer or actuator utilizing corrugated supports 59 1991
 
The Charles Stark Draper Laboratory, Inc. (2)
* 5146435 Acoustic transducer 169 1989
* 5452268 Acoustic transducer with improved low frequency response 185 1994
 
KNOWLES ELECTRONICS, LLC (3)
* 6535460 Miniature broadband acoustic transducer 106 2001
* 6847090 Silicon capacitive microphone 55 2002
* 2002/0106,828 Silicon capacitive microphone 5 2002
 
BRUEL & KJAER SOUND & VIBRATION MEASUREMENT A/S (1)
* 2003/0021,432 Micromachined capacitive component with high stability 3 2002
 
AMERICAN TECHNOLOGY CORPORATION (1)
* 6535612 Electroacoustic transducer with diaphragm securing structure and method 24 1999
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
INVENSENSE, INC. (19)
7825484 Micromachined microphone and multisensor and method for producing same 42 2005
* 2006/0237,806 Micromachined microphone and multisensor and method for producing same 29 2005
7961897 Microphone with irregular diaphragm 10 2006
* 2007/0064,968 Microphone with irregular diaphragm 9 2006
7449356 Process of forming a microphone using support member 16 2006
* 2007/0092,983 Process of Forming a Microphone Using Support Member 7 2006
7885423 Support apparatus for microphone diaphragm 15 2007
8270634 Multiple microphone system 12 2007
* 2008/0049,953 Multiple Microphone System 10 2007
9078068 Microphone with aligned apertures 0 2008
* 2008/0304,681 Microphone with Aligned Apertures 18 2008
8309386 Process of forming a microphone using support member 8 2008
* 2009/0029,501 Process of Forming a Microphone Using Support Member 10 2008
8351632 Noise mitigating microphone system and method 4 2009
* 2010/0054,495 Noise Mitigating Microphone System and Method 4 2009
8363860 MEMS microphone with spring suspended backplate 1 2010
* 2010/0278,372 MEMS Microphone with Spring Suspended Backplate 4 2010
8358793 Microphone with irregular diaphragm 5 2011
* 9338559 Microphone system with a stop member 0 2013
 
Other [Check patent profile for assignment information] (1)
* 2012/0328,132 Perforated Miniature Silicon Microphone 7 2011
 
CIRRUS LOGIC, INC. (1)
8198715 MEMS device and process 0 2008
 
NEOMEMS TECHNOLOGIES, INC., WUXI, CHINA (1)
* 8571249 Silicon microphone package 4 2010
 
PANASONIC CORPORATION (2)
* 2010/0002,895 CONDENSER MICROPHONE AND MEMS DEVICE 8 2009
* 2010/0119,097 MICROPHONE DEVICE AND MANUFACTURING METHOD THEREOF 9 2009
 
SNAPTRACK, INC. (25)
9158106 Display methods and apparatus 1 2006
8482496 Circuits for controlling MEMS display apparatus on a transparent substrate 7 2007
9229222 Alignment methods in fluid-filled MEMS displays 0 2007
9176318 Methods for manufacturing fluid-filled MEMS displays 0 2007
8519945 Circuits for controlling display apparatus 10 2007
8526096 Mechanical light modulators with stressed beams 15 2009
9182587 Manufacturing structure and process for compliant mechanisms 0 2009
* 8169679 MEMS anchors 22 2009
* 2010/0110,518 MEMS ANCHORS 15 2009
9082353 Circuits for controlling display apparatus 2 2010
9261694 Display apparatus and methods for manufacture thereof 2 2011
9087486 Circuits for controlling display apparatus 3 2011
8520285 Methods for manufacturing cold seal fluid-filled display apparatus 3 2011
8519923 Display methods and apparatus 9 2012
* 8599463 MEMS anchors 13 2012
* 2012/0200,906 MEMS ANCHORS 18 2012
9135868 Direct-view MEMS display devices and methods for generating images thereon 0 2012
9274333 Alignment methods in fluid-filled MEMS displays 0 2012
9500853 MEMS-based display apparatus 0 2012
9336732 Circuits for controlling display apparatus 0 2012
9134552 Display apparatus with narrow gap electrostatic actuators 0 2013
8891152 Methods for manufacturing cold seal fluid-filled display apparatus 0 2013
9177523 Circuits for controlling display apparatus 1 2013
9128277 Mechanical light modulators with stressed beams 0 2013
9116344 MEMS anchors 0 2013
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (3)
* 7912235 Capacitive microphone and method for making the same 6 2006
8468665 Methods for making capacitive microphone 0 2011
* 2011/0131,794 METHODS FOR MAKING CAPACITIVE MICROPHONE 1 2011
 
ANALOG DEVICES, INC. (1)
* 2008/0175,425 Microphone System with Silicon Microphone Secured to Package Lid 38 2007
 
THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK (5)
* 7903835 Miniature non-directional microphone 3 2006
* 2008/0101,641 MINIATURE NON-DIRECTIONAL MICROPHONE 2 2006
* 8374371 Miniature non-directional microphone 2 2011
* 2011/0150,260 MINIATURE NON-DIRECTIONAL MICROPHONE 6 2011
9554213 Hinged MEMS diaphragm 0 2015
 
YAMAHA CORPORATION (3)
* 2009/0060,232 Condenser microphone 6 2008
* 2009/0190,782 Vibration transducer 4 2008
* 2009/0136,064 Vibration transducer and manufacturing method therefor 5 2008
 
WOLFSON MICROELECTRONICS PLC (1)
* 2011/0303,994 MEMS DEVICE AND PROCESS 2 2010
 
ROBERT BOSCH GMBH (4)
8921957 Method of improving MEMS microphone mechanical stability 3 2013
9624091 Trapped membrane 0 2014
9369804 MEMS membrane overtravel stop 0 2014
9681243 In-plane overtravel stops for MEMS microphone 0 2015
 
American Audio Components Inc. (4)
* 8265309 Condenser microphone 3 2009
* 2010/0124,343 CONDENSER MICROPHONE 4 2009
* 8731220 MEMS microphone 0 2011
* 2012/0294,464 MEMS Microphone 1 2011
 
CIRRUS LOGIC INTERNATIONAL SEMICONDUCTOR LTD. (1)
* 2014/0016,798 MEMS DEVICE 3 2013
 
KNOWLES IPC (M) SDN BHD (2)
* 8526665 Electro-acoustic transducer comprising a MEMS sensor 15 2008
* 2010/0195,864 ELECTRO-ACOUSTIC TRANSDUCER COMPRISING A MEMS SENSOR 17 2008
* Cited By Examiner