US Patent Application No: 2006/0280,319

Number of patents in Portfolio can not be more than 2000

Micromachined Capacitive Microphone

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Abstract

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This invention relates to a micromachined capacitive microphone having a shallowly corrugated diaphragm that is anchored at one or more locations on the support has a plurality of dimples to support itself and rest freely on the perforated backplate. The diaphragm whose ends are not anchored is bounded by the taps of edge rail. Also disclosed includes: a fixed perforated backplate having one or more regions; an adjustable cantilever formed by the diaphragm, the support and the backplate; a plurality of dimples maintaining vertical separation between diaphragm and backplate; and the patterning of conductor electrodes carried by diaphragm and backplate.

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First Claim

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Patent Owner(s)

Patent OwnerAddressTotal Patents
GENERAL MEMS CORPORATIONSUNNYVALE, CA0

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ata, Erhan San Diego, CA 3 62
Wang, Yunlong Fremont, CA 21 192
Wu, Guanghua Dublin, CA 7 113

Cited Art Landscape

Patent Info (Count) # Cites Year
 
SHARP KABUSHIKI KAISHA (1)
* 6,870,937 Electroacoustic transducer, process of producing the same and electroacoustic transducing device using the same 16 2000
 
IC Sensors, Inc. (1)
* 5,209,118 Semiconductor transducer or actuator utilizing corrugated supports 57 1991
 
The Charles Stark Draper Laboratory, Inc. (2)
* 5,146,435 Acoustic transducer 165 1989
* 5,452,268 Acoustic transducer with improved low frequency response 178 1994
 
KNOWLES ELECTRONICS, LLC (3)
* 6,535,460 Miniature broadband acoustic transducer 97 2001
* 6,847,090 Silicon capacitive microphone 52 2002
* 2002/0106,828 Silicon capacitive microphone 5 2002
 
Bruel & Kjaer Sound & Vibration Measurement A/S (1)
* 2003/0021,432 Micromachined capacitive component with high stability 2 2002
 
AMERICAN TECHNOLOGY CORPORATION (1)
* 6,535,612 Electroacoustic transducer with diaphragm securing structure and method 23 1999
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
INVENSENSE, INC. (19)
7,825,484 Micromachined microphone and multisensor and method for producing same 33 2005
* 2006/0237,806 Micromachined microphone and multisensor and method for producing same 25 2005
7,961,897 Microphone with irregular diaphragm 7 2006
* 2007/0064,968 Microphone with irregular diaphragm 8 2006
7,449,356 Process of forming a microphone using support member 15 2006
* 2007/0092,983 Process of Forming a Microphone Using Support Member 5 2006
7,885,423 Support apparatus for microphone diaphragm 10 2007
8,270,634 Multiple microphone system 11 2007
* 2008/0049,953 Multiple Microphone System 9 2007
9,078,068 Microphone with aligned apertures 0 2008
* 2008/0304,681 Microphone with Aligned Apertures 15 2008
8,309,386 Process of forming a microphone using support member 7 2008
* 2009/0029,501 Process of Forming a Microphone Using Support Member 9 2008
8,351,632 Noise mitigating microphone system and method 4 2009
* 2010/0054,495 Noise Mitigating Microphone System and Method 3 2009
8,363,860 MEMS microphone with spring suspended backplate 0 2010
* 2010/0278,372 MEMS Microphone with Spring Suspended Backplate 2 2010
8,358,793 Microphone with irregular diaphragm 5 2011
* 9,338,559 Microphone system with a stop member 0 2013
 
Other [Check patent profile for assignment information] (1)
* 2012/0328,132 Perforated Miniature Silicon Microphone 6 2011
 
CIRRUS LOGIC, INC. (1)
8,198,715 MEMS device and process 0 2008
 
NEOMEMS TECHNOLOGIES, INC., WUXI, CHINA (1)
* 8,571,249 Silicon microphone package 2 2010
 
SNAPTRACK, INC. (25)
9,158,106 Display methods and apparatus 1 2006
8,482,496 Circuits for controlling MEMS display apparatus on a transparent substrate 7 2007
9,229,222 Alignment methods in fluid-filled MEMS displays 0 2007
9,176,318 Methods for manufacturing fluid-filled MEMS displays 0 2007
8,519,945 Circuits for controlling display apparatus 10 2007
8,526,096 Mechanical light modulators with stressed beams 14 2009
9,182,587 Manufacturing structure and process for compliant mechanisms 0 2009
* 8,169,679 MEMS anchors 22 2009
* 2010/0110,518 MEMS ANCHORS 14 2009
9,082,353 Circuits for controlling display apparatus 2 2010
9,261,694 Display apparatus and methods for manufacture thereof 1 2011
9,087,486 Circuits for controlling display apparatus 2 2011
8,520,285 Methods for manufacturing cold seal fluid-filled display apparatus 2 2011
8,519,923 Display methods and apparatus 9 2012
* 8,599,463 MEMS anchors 13 2012
* 2012/0200,906 MEMS ANCHORS 18 2012
9,135,868 Direct-view MEMS display devices and methods for generating images thereon 0 2012
9,274,333 Alignment methods in fluid-filled MEMS displays 0 2012
9,500,853 MEMS-based display apparatus 0 2012
9,336,732 Circuits for controlling display apparatus 0 2012
9,134,552 Display apparatus with narrow gap electrostatic actuators 0 2013
8,891,152 Methods for manufacturing cold seal fluid-filled display apparatus 0 2013
9,177,523 Circuits for controlling display apparatus 1 2013
9,128,277 Mechanical light modulators with stressed beams 0 2013
9,116,344 MEMS anchors 0 2013
 
PANASONIC CORPORATION (2)
* 2010/0002,895 CONDENSER MICROPHONE AND MEMS DEVICE 4 2009
* 2010/0119,097 MICROPHONE DEVICE AND MANUFACTURING METHOD THEREOF 8 2009
 
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (3)
* 7,912,235 Capacitive microphone and method for making the same 5 2006
8,468,665 Methods for making capacitive microphone 0 2011
* 2011/0131,794 METHODS FOR MAKING CAPACITIVE MICROPHONE 1 2011
 
ANALOG DEVICES, INC. (1)
* 2008/0175,425 Microphone System with Silicon Microphone Secured to Package Lid 29 2007
 
The Research Foundation of State University of New York (4)
* 7,903,835 Miniature non-directional microphone 2 2006
* 2008/0101,641 MINIATURE NON-DIRECTIONAL MICROPHONE 2 2006
* 8,374,371 Miniature non-directional microphone 1 2011
* 2011/0150,260 MINIATURE NON-DIRECTIONAL MICROPHONE 4 2011
 
Yamaha Corporation (3)
* 2009/0060,232 Condenser microphone 3 2008
* 2009/0190,782 Vibration transducer 3 2008
* 2009/0136,064 Vibration transducer and manufacturing method therefor 5 2008
 
WOLFSON MICROELECTRONICS PLC (1)
* 2011/0303,994 MEMS DEVICE AND PROCESS 2 2010
 
ROBERT BOSCH GMBH (2)
8,921,957 Method of improving MEMS microphone mechanical stability 2 2013
9,369,804 MEMS membrane overtravel stop 0 2014
 
AMERICAN AUDIO COMPONENTS INC. (4)
* 8,265,309 Condenser microphone 2 2009
* 2010/0124,343 CONDENSER MICROPHONE 3 2009
* 8,731,220 MEMS microphone 0 2011
* 2012/0294,464 MEMS Microphone 1 2011
 
KNOWLES IPC (M) SDN BHD (2)
* 8,526,665 Electro-acoustic transducer comprising a MEMS sensor 13 2008
* 2010/0195,864 ELECTRO-ACOUSTIC TRANSDUCER COMPRISING A MEMS SENSOR 15 2008
* Cited By Examiner