Micromachined Capacitive Microphone
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United States of America Patent
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Issued Date -
Dec 14, 2006
app pub date -
Jun 8, 2005
filing date -
Jun 8, 2005
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
This invention relates to a micromachined capacitive microphone having a shallowly corrugated diaphragm that is anchored at one or more locations on the support has a plurality of dimples to support itself and rest freely on the perforated backplate. The diaphragm whose ends are not anchored is bounded by the taps of edge rail. Also disclosed includes: a fixed perforated backplate having one or more regions; an adjustable cantilever formed by the diaphragm, the support and the backplate; a plurality of dimples maintaining vertical separation between diaphragm and backplate; and the patterning of conductor electrodes carried by diaphragm and backplate.
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