Lithographic apparatus and device manufacturing method for writing a digital image
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 22, 2010
Grant Date -
Dec 14, 2006
app pub date -
Jun 8, 2005
filing date -
Jun 8, 2005
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
First pluralities of radiation spots generated by an array of individually controllable elements are exposed on a substrate. The radiation spots are equally spaced across an entire area of the substrate to be exposed. The substrate is then shifted relative to the array of individually controllable elements in a direction perpendicular to a scanning direction of the substrate. Second pluralities of radiation spots generated by the array of individually controllable elements are alternatingly formed on the substrate with respect to each of the first plurality of spots.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully