Mask etch processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7879151
APP PUB NO 20070007660A1
SERIAL NO

11530676

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Method and apparatus for supporting and transferring a substrate in a semiconductor wafer processing system are provided. In one aspect, an apparatus is provided for supporting a substrate comprising a cover ring comprising a base having a bore disposed therethough, the base having an upper surface and one or more raised surfaces disposed adjacent the bore, wherein the raised surface comprise one or more first substrate support members disposed adjacent an edge of the bore and a capture ring disposed on the cover ring, the capture ring comprising a semi-circular annular ring having an inner perimeter corresponding to the bore of the cover ring and one or more second substrate support members disposed on the inner perimeter and adapted to receive a substrate, wherein the capture ring is adapted to mate with the cover ring and form one contiguous raised surface on the cover ring.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
APPLIED MATERIALS, INC.SANTA CLARA, CA5805

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mak, Alfred W Union City, US 43 1884
Nguyen, Khiem San Jose, US 14 174
Satitpunwaycha, Peter Santa Clara, US 22 395

Cited Art Landscape

Patent Info (Count) # Cites Year
 
NOVELLUS SYSTEMS, INC. (1)
5791895 Apparatus for thermal treatment of thin film wafer 10 1996
 
ISTITUTO GUIDO DONEGANI S.P.A., VIA CADUTI DEL LAVORO (1)
4813732 Apparatus and method for automated wafer handling 56 1987
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
5647626 Wafer pickup system 52 1995
 
BROOKS AUTOMATION, INC. (2)
5180276 Articulated arm transfer device 89 1991
5720590 Articulated arm transfer device 47 1995
 
ASM America, Inc. (2)
5324155 Wafer handling system with bernoulli pick-up 64 1992
6776849 Wafer holder with peripheral lift ring 4 2002
 
Semitool, Inc. (1)
* 6322678 Electroplating reactor including back-side electrical contact apparatus 12 1998
 
KOKUSAI ELECTRIC CO., LTD. (2)
5669644 Wafer transfer plate 50 1995
6217663 Substrate processing apparatus and substrate processing method 17 1997
 
Moore Epitaxial, Inc. (1)
5580388 Multi-layer susceptor for rapid thermal process reactors 42 1995
 
APPLIED MATERIALS, INC. (22)
4586743 Robotic gripper for disk-shaped objects 52 1984
4842683 Magnetic field-enhanced plasma etch reactor 283 1988
5280983 Semiconductor processing system with robotic autoloader and load lock 73 1992
5643366 Wafer handling within a vacuum chamber using vacuum 48 1994
5469035 Two-axis magnetically coupled robot 71 1994
* 5558717 CVD Processing chamber 365 1994
5673922 Apparatus for centering substrates on support members 17 1995
5632873 Two piece anti-stick clamp ring 51 1995
5611865 Alignment of a shadow frame and large flat substrates on a heated support 64 1996
5820685 Wafer support device 43 1997
5922133 Multiple edge deposition exclusion rings 30 1997
6074488 Plasma chamber support having an electrically coupled collar ring 57 1997
* 6123804 Sectional clamp ring 36 1999
6589352 Self aligning non contact shadow ring process kit 33 1999
* 6537011 Method and apparatus for transferring and supporting a substrate 25 2000
6726804 RF power delivery for plasma processing using modulated power signal 7 2001
6676759 Wafer support device in semiconductor manufacturing device 13 2001
2003/0220,708 Integrated equipment set for forming shallow trench isolation regions 21 2002
* 7128806 Mask etch processing apparatus 95 2003
* 2005/0133,166 Tuned potential pedestal for mask etch processing apparatus 2 2004
* 2005/0263,066 Apparatus for electroless deposition of metals onto semiconductor substrates 26 2005
* 2007/0007,660 MASK ETCH PROCESSING APPARATUS 2 2006
 
TEXAS INSTRUMENTS INCORPORATED (1)
5022695 Semiconductor slice holder 59 1989
 
SUMITOMO HEAVY INDUSTRIES, LTD. (1)
5702228 Robotic arm supporting an object by interactive mechanism 65 1996
 
TET TECHNO INVESTMENT TRUST SETTLEMENT, A CORP. OF PRINCEIPALITY OF LIECHTENSTEIN (1)
5133635 Method and apparatus for holding and conveying platelike substrates 77 1990
 
VARIAN ASSOCIATES, INC. (1)
4705951 Wafer processing system 142 1986
 
ASML HOLDING N.V. (1)
5733096 Multi-stage telescoping structure 36 1995
 
TOKYO ELECTRON LIMITED (2)
5374147 Transfer device for transferring a substrate 47 1992
6203617 Conveying unit and substrate processing unit 22 1999
 
LEYBOLD AKTIENGESELLSCHAFT (1)
4869801 Apparatus for mounting workpieces 37 1988
* Cited By Examiner

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